Metropoly Systems Toho Technology
DEV2019-01-16T12:55:46+07:00Metropoly Systems (Toho Technology)
Metropoly Systems of Toho Technology provides the different options help you choose easier with your budget.
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FLX Series
FLX Series
FLX systems resolve problems such as metal and dielectric film cracking, voiding, and lifting formation. Equipped with a heating element for stress monitoring at high temperatures and an optional cooling unit that allows a thorough understanding of film properties at temperatures from –65°C to 500°C, the Toho FLX systems offer outstanding value in a variety of comprehensive Stress Measurement Solutions.
Spec sheet
TohoSpec 3100
TohoSpec 3100
The flexible software platform makes it simple and easy for the user to configure measurement programs and recipes for both simple and advanced measurement applications. With the ability to select film constants, scan ranges and substrate types, the 3100 is the ideal tool for rapid measurement program development.
Spec sheet
FP Series
FP Series
Incorporating KLA-Tencor’s proprietary low-force measurement head, Toho Profilers provide low stylus force and achieve highly accurate micron to nanometer range measurements to analyze surface flatness, surface roughness, waviness, peak to valley, curvature, texture, stress, and feature dimensions on any square FPD substrate larger than 300mm.
Spec sheet
NanoSpec 6500
NanoSpec 6500
Product enhancements include the integration of ultra-violet (UV) spectroscopic reflectometry for the measurement of low temperature, deposited poly-silicon films and UV to near infra-red (NIR) as well as spectroscopic ellipsometry (SE) for the measurement of multilayer film stacks and improved measurement precision.
Data management features include a database, statistical analysis, histograms and the ability to and export data files. Both Tabular and Cauchy dispersion models are available for use and material files may be imported and exported.
Features
FPM Series
FLX Series
Toho Optical profilers are white light interferometer systems, offering fast, non-contact, high-precision 3D metrology of surface features. Toho systems include the proprietary MetroPro® Software. Choosing the right surface measurement system depends on your application’s requirements, including precision, speed, automation, configuration flexibility, and vertical range. The FPM is a series specifically designed to inspect cellular flat panels or large displays requiring high-res analyses. Using ZYGO’s patented scanning white light interferometry (SWLI) technology, the FPM series 3D optical surface profilers easily measure a wide range of surfaces, including smooth, rough, flat, sloped, and stepped surfaces.
Spec sheet
Stealth Series
Stealth Series
Features
Axo Series
Axo Series
The AxoScan™ is the fastest, most powerful polarization measurement tool available as it measures all of the polarization properties (full Mueller matrix) of a sample in 30 ms. Measurements are made in a single location, typically in a 3 mm diameter beam. With beam shaping optics, the measurement area can be reduced to a few microns, or expanded to 10 mm or larger.
The AxoStep™ is the industry’s first Mueller Matrix imaging microscope. A breakthrough new instrument for polarization testing, The AxoStep measures all possible polarization properties (the complete Mueller Matrix) for every pixel in an image in as little as 14 seconds. Different microscope objectives are available for measuring different sample areas.
Features
KSI Series
KSI Series
The versatile V8 can be upgraded and customized to fit into any R&D or production level process. KSI has truly created the future of Acoustic Microscopy.
Spec sheet
