Equipment outline
This system is specializes in Wafer Carrier Cleaning and parts cleaning.
Cassette, Box, SMIF and FOUP cleaning.
Main Feature
Cleaning Systems for Wafer Carriers
- 300MM FOUPs: Entegris F300, Asyst A300, SEP FOUP.
- 300MM FOSBs: Kakizaki, MW300, CrystalPak, SEP FOSB.
- 200MM SMIF POD.
- 4”, 6” and 8” Carriers: UltraPak, SEP E99.