Máy vệ sinh wafer
DEV2021-03-26T15:56:24+07:00MÁY VỆ SINH WAFER
HNFCONS cung cấp các loại máy vệ sinh cho Si Wafer, Image Sensor, QFN Strip,… sử dụng trong công nghiệp sản xuất bán dẫn. Dưới đây là một số sản phẩm tham khảo.
Liên hệ
DANH MỤC SẢN PHẨM
Máy vệ sinh wafer tự động
Fully Automatic Wafer Cleaning Machine
General Specification:
- Capable to clean up to 12″ wafer diameter.
- Cleaning method: Air atomizing nozzle.
- Cleaning program: >20
- Table rotation: programmable 100-30,000 rpm.
- Touch panel.
- Porous type spinner table. (Option)
Solder Ball Cleaner (AMT 5913)
Equipment outline
This system is cleaning the reflow residue by Air+D.I Water and drying by Halogen Lamp and air blower.
Main Feature
- Target Strip : W 75mm / L 280mm
- Parallel : 4 Site para Clean & Dry
- Cycle Time : 13 sec / 1 strip
- Throughput : Max. 40,000 UPH ( 85% Efficiency ) ( 150 Device / 1 Strip )
- Loading / Unloading:
- Loading – 4 pitch roller
- Unloading – Magazine Elevator
- Buffer – Maker Magazine ( 40ea ) Elevator
VerSum Ultra Cleaning System
Equipment outline
This system is specializes in Wafer Carrier Cleaning and parts cleaning.
Cassette, Box, SMIF and FOUP cleaning.
Main Feature
Cleaning Systems for Wafer Carriers
- 300MM FOUPs: Entegris F300, Asyst A300, SEP FOUP.
- 300MM FOSBs: Kakizaki, MW300, CrystalPak, SEP FOSB.
- 200MM SMIF POD.
- 4”, 6” and 8” Carriers: UltraPak, SEP E99.
VerSum GSS Acid Cleaning Station
Equipment outline
Acid Cleaning Station is a self-contained, fully automatic system designed to acid clean and rinse exhaust lines and other parts using precise preprogrammed recipes.
Main Feature
Sink:
- 74” left to right, 24” front to rear, and 18” deep. Total approximate depth for acid is 12”, and 18” for rinse water. The total sink volume is 138 gallons.
Footprint:
- Measures 114” left to right, 60” front to rear, and 79” high.
VerSum Vertical Furnace Quartzware Cleaner
Equipment outline
The Vertical Furnace Quartzware Cleaner is an automatic, self-contained system used to safely and automatically clean vertical furnace quartzware utilizing both a spray (for tubes) and an immersion bath (smaller components).
Main Feature
- 2 tubes cleaning station, 1 with rotating spray and the other with semi-auto halo fixture.
- Immersion bath for smaller component.
- Able to clean process tube, inner tube, boat, pedestal, T/C, Torch and accessories in one recipe.
VerSum Typhoon Quartzware Cleaner
Equipment outline
The Typhoon offers a faster and cleaner process with improved cost of ownership. The tool provides two process chambers with simultaneous independent operation.
Main Feature
- Independent and simultaneous operating chambers
- No cross-contamination between the two chambers
- 200mm and 300mm compatible
- Reduced acid usage through spray process