RF Electric Discharge Type Excimer Lamp
RF Electric Discharge Type Excimer Lamp
FLAT EXCIMER EX-400 L11751-01
Use of a flat long lamp and RF (radio frequency) discharge delivers stable output with uniform irradiation over a large area and less flickering. The EX-400 ensures highly accurate, high quality modification, cleaning, and bonding compared to corona discharge method, plasma method, and even other excimer lamps.
FLAT EXCIMER EX-mini L125300-01
Extraordinary portability makes it possible to make simple yet high accuracy tests and evaluations nearly anywhere. The EX-mini designed for R&D work offers the same performance as the EX-400 & EX-86U excimer lamp sources made for in-line operation, so you can put evaluation results from the EX-mini to use right away for in-line operation tasks.
FLAT EXCIMER EX-86U L13129
The “all-in-one” design with an internal power supply achieved a compact, lightweight body that can easily be set up in production sites by eliminating installation hassles with no need to choose installation space. High versatility for in-line usage makes it simple to incorporate the EX-86U into already existing lines and relocate production lines, etc.